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Line-up Product feature Single shipper for 50,75 wafer Σ-300 FOSB SS300
  Components and materials Dimension(mm) Weight(g) Download
[Σ-Series] Manual handle Robotic flange Door Filter Bottom-plate Bottom Cushion Gasket Clamp Length Width Height Figures
 Σ-300 FOSB PC PC PC PE / PTFE PC PC PBT TPE PC 389.5 328.5 351.7 4500
 
  Components and materials Dimension(mm) Weight(g) Download
  Cover Cassette Case Bottom Cushion Gasket Clip Length Width Height Figures
 Σ-200 PC PP - PP PP TPE - 271 271 243 1976
 Σ-150 PC PP - PP PP TPE - 196 175 188 895
 Σ-125K-2 PC - PP - PE TPE - 174 161 166 577
 Σ-100K-1 PC PP - PP PE TPE - 175 141 139 562
[α-Series]                          
 α-200 PC PP - PP PP TPE PA/GF 271 271 249 1855
 α-150 PP+(PA/GF) PP - PP PE silicon rubber - 190 171 192 1019
 α-125K-1 PP+(PA/GF) PP - PP PE silicon rubber - 172 162 164 780
 α-125K-2 PP+(PA/GF) - PP - PE silicon rubber - 170 160 164 620
 α-100K-1 PP+(PA/GF) PP - PP PE silicon rubber - 171 140 139 666
[Ω-Series]                          
 Ω-200 PMMA PP - PP PP TPE - 271 271 243 1970
 Ω-150 PMMA PP - PP PP TPE - 175 200 188 905
 Ω-125K-2 PMMA - PP - PE TPE - 174 161 166 562 - -
 Ω-100K-1 PMMA PP - PP PE TPE - 175 141 139 550 - -
[SS-Series]                          
 SS300 PC - PC - TPE TPE - 339 339 43 993
 SS300-Ω PMMA - PMMA - TPE TPE - 339 339 43 917
 SS75 PC - PC - PBT - - 91 91 14 37
 SS50 PC - PC - PBT - - 63 63 14 18
 
Abbreviated designation Formal designation Abbreviated designation Formal designation
PC Polycarbonate PMMA Polymethylmethacrylate
PP Polypropylene TPE Thermoplastic Elastomer
PA Polyamide PBT Polybutylene terephthalate
GF Glass Fiber PTFE Polytetrafluoroethylene
PE Polyethylene - not applied
 Remarks 
1) ÒK-1ÓandÓK-2Ó of Name mean as below.
K-1 ; Separate type of Cassette/Bottom
K-2 ; Joint type of Cassette/Bottom(called “Case”)
2) At Cover of α-series, the reinforcement parts of Cover are showed inside of ( ).
3) Dimension mean as below
Length ; Vertical direction against wafers
Width ; Horizontal direction against wafers
4) Dimension and weight are not guaranteed.
 
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