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To transport wafer cleanly more than the past
(1) Outgas is controlled and lower organic contamination can be realized. |
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Σ-300 FOSB |
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Σ-125K-2 |
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Transport within wafer process and storage are possible.
(1) Measure for Electro-Static Discharge
(2) Particle adhesion prevention measure by antistatic performance |
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Ω-125K-2 |
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To prevent particle ingression into box during transportation.
(1) Particle adhesion prevention measure by high sealing
performance.
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α-200
α-150
α-125K-1
α-100K-1 |
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α-125K-2 |
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To transport wafer cleanly more than the past.
Cover and case are transparent, so wafer can be easily checked.
Compact loading height.
To prepare anti-static type. |
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Numerical numbers on each type of box indicate diameter of stored wafer. |
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